Compact Mass Spectrometer for Vacuum Process Monitoring

The Reactorr–V™ system from ESS is the new bespoke vacuum process application that offers truly unique real time monitoring throughout the entire vacuum process. The Rectorr-V™ features automated inlet sensors that can pick up changes in the process pressure, adjusting itself to maintain the correct pressure in the analyzer housing. This dynamic instrument features an automatic wide range inlet meaning that the system is suitable to monitor from atmospheric (1000mbar) to high vacuum (10E-9mbar).
With detection levels in the low parts of the per billion range, and a compact, low footprint design (30x30cm) meaning that the Reactorr-V™ can be connected either directly to or adjacent to the vacuum process tool, and enhance the integrity of the process, maximizing time and revenue. Suitable applications include:

• Baseline RGA Monitoring
• Glass Coating/Special Treatments
• Freeze Drying
• Solar panel research and manufacture
• Materials outgassing studies
• Vacuum Coating
• Vacuum Heat Treatment
• Sputter Coating
• Thin Film Applications
• Curing